GAAS P-LAYER FORMATION BY BE ION-IMPLANTATION

被引：1

|

作者：

SUGATA, S

TSUKADA, N

NAKAJIMA, M

KURAMOTO, K

MITA, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 07期

关键词：

D O I：

10.1143/JJAP.22.L470

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L470 / L472

页数：3

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