OPTICAL DETECTION OF BE ION-IMPLANTATION DAMAGE IN GAAS

被引：0
|
作者：
MOLNAR, B [1 ]
机构：
[1] USN,ELECTR TECHNOL DIV,RES LAB,WASHINGTON,DC 20375
来源：
REPORT OF NRL PROGRESS | 1975年 / MAR期
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D O I：
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中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
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页码：21 / 24
页数：4
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