ION-IMPLANTATION INTO GAAS FOR MICROWAVE DEVICE APPLICATIONS

被引：0
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作者：
PAULSON, WM
机构：
来源：
IEEE TRANSACTIONS ON NUCLEAR SCIENCE | 1983年 / 30卷 / 02期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：1715 / 1717
页数：3
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