An illustration of 90nm CMOS layout on PC

被引:0
|
作者
Sicard, E [1 ]
Ben Dhia, S [1 ]
机构
[1] DGEI, INSA, F-31077 Toulouse, France
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D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The 90nm CMOS process technology, in commercial production in 2004, includes copper interconnects, 6 to 12 metal layers and 5-10 types of MOS devices. In co-operation with ST-microelectronics, the layout editor/simulator MICROWIND has been configured to support this state-of-the art CMOS process for research and training purpose. This paper describes the recent developments and their application to microelectronics training.
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页码:315 / 318
页数:4
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