SE+ ION-IMPLANTATION INTO ENCAPSULATED GAAS

被引：6

|

作者：

SHAHID, MA

GWILLIAM, R

SEALY, BJ

机构：

来源：

ELECTRONICS LETTERS | 1985年 / 21卷 / 17期

关键词：

D O I：

10.1049/el:19850514

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：729 / 730

页数：2

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