COMPOSITE THIN-FILM UHF BULK ACOUSTIC-WAVE RESONATORS ON GAAS

被引:0
|
作者
KLINE, GR
LAKIN, KM
机构
[1] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,MICROELECTRON RES CTR,AMES,IA 50011
来源
关键词
D O I
暂无
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
引用
下载
收藏
页码:96 / 96
页数:1
相关论文
共 50 条
  • [21] 3D simulation of thin-film bulk acoustic wave resonators (FBAR)
    Giraud, Sylvain
    Bila, Stephane
    Aubourg, Michel
    Cros, Dominique
    2006 13TH IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS, VOLS 1-3, 2006, : 1038 - 1041
  • [22] Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators
    Li, Nian
    Qian, Zhenghua
    Yang, Jiashi
    AIP ADVANCES, 2017, 7 (05):
  • [23] SPURIOUS RESONANCES IN BULK ACOUSTIC-WAVE RESONATORS
    YOO, KB
    UBERALL, H
    WILLIAMS, W
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1983, 30 (03): : 188 - 188
  • [24] Switched Mode Thin Film Bulk Acoustic Wave Resonators
    Koohi, Milad Zolfagharloo
    Mortazawi, Amir
    2019 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2019, : 528 - 531
  • [25] PZT Thin Film Bulk Acoustic Wave Resonators and filters
    Kirby, PB
    Su, QX
    Komuro, E
    Zhang, Q
    Imura, M
    Whatmore, RW
    PROCEEDINGS OF THE 2001 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2001, : 687 - 694
  • [26] Intrinsically switchable thin film bulk acoustic wave resonators
    Vorobiev, A.
    Gevorgian, S.
    APPLIED PHYSICS LETTERS, 2014, 104 (22)
  • [27] Mass sensitive thin film bulk acoustic wave resonators
    Loschonsky, M.
    Eisele, D.
    Reindl, L. M.
    PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, VOLS 1 AND 2, 2006, : 111 - +
  • [28] Sensitivity considerations in localized mass detection based on thin-film bulk acoustic wave resonators
    Campanella, Humberto
    Esteve, Jaume
    Montserrat, Josep
    Romano-Rodriguez, Albert
    Uranga, Arantxa
    Abadal, Gabriel
    Barniol, Nuria
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1828 - +
  • [29] Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators
    Kirby, PB
    Potter, MDG
    Williams, CP
    Lim, MY
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2003, 23 (14) : 2689 - 2692
  • [30] ACOUSTIC BULK WAVE COMPOSITE RESONATORS
    LAKIN, KM
    WANG, JS
    APPLIED PHYSICS LETTERS, 1981, 38 (03) : 125 - 127