COMPOSITE THIN-FILM UHF BULK ACOUSTIC-WAVE RESONATORS ON GAAS

被引:0
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作者
KLINE, GR
LAKIN, KM
机构
[1] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,MICROELECTRON RES CTR,AMES,IA 50011
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中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
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页码:96 / 96
页数:1
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