COMPOSITE THIN-FILM UHF BULK ACOUSTIC-WAVE RESONATORS ON GAAS

被引：0
|
作者：
KLINE, GR
LAKIN, KM
机构：
[1] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,MICROELECTRON RES CTR,AMES,IA 50011
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1985年 / 32卷 / 01期
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
引用
下载
收藏
页码：96 / 96
页数：1
相关论文
共 50 条
  • [1] 1.0-GHZ THIN-FILM BULK ACOUSTIC-WAVE RESONATORS ON GAAS
    KLINE, GR
    LAKIN, KM
    APPLIED PHYSICS LETTERS, 1983, 43 (08) : 750 - 751
  • [2] Imaging of acoustic fields in bulk acoustic-wave thin-film resonators
    Safar, H
    Kleiman, RN
    Barber, BP
    Gammel, PL
    Pastalan, J
    Huggins, H
    Fetter, L
    Miller, R
    APPLIED PHYSICS LETTERS, 2000, 77 (01) : 136 - 138
  • [3] Characteristics of ZnO thin film for film bulk acoustic-wave resonators
    Kok-Wan Tay
    Po-Hsun Sung
    Yi-Cheng Lin
    Tsung-Jui Hung
    Journal of Electroceramics, 2008, 21 : 178 - 183
  • [4] Characteristics of ZnO thin film for film bulk acoustic-wave resonators
    Tay, Kok-Wan
    Sung, Po-Hsun
    Lin, Yi-Cheng
    Hung, Tsung-Jui
    JOURNAL OF ELECTROCERAMICS, 2008, 21 (1-4) : 178 - 183
  • [5] Performance characterization of thin AlN films deposited on Mo electrode for thin-film bulk acoustic-wave resonators
    Tay, KW
    Huang, CL
    Wu, L
    Lin, MS
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (8A): : 5510 - 5515
  • [6] Accelerometer based on thin-film bulk acoustic wave resonators
    Campanella, Humberto
    Antonio Plaza, Jose
    Montserrat, Josep
    Esteve, Jaume
    Uranga, Arantxa
    Barniol, Nuria
    2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6, 2007, : 1148 - +
  • [7] UHF SURFACE ACOUSTIC-WAVE RESONATORS
    STAPLES, EJ
    ROSENFELD, RC
    HARTMANN, CS
    SCHOENWALD, JS
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1975, SU22 (03): : 218 - 219
  • [8] SURFACE ACOUSTIC-WAVE ATTENUATION BY A THIN-FILM
    SNIDER, DR
    FREDRICKSEN, HP
    SCHNEIDER, SC
    JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) : 3215 - 3222
  • [9] The modeling of thin-film bulk acoustic wave resonators using the FDTD method
    Seo, KW
    Ju, S
    Kim, H
    IEEE ELECTRON DEVICE LETTERS, 2002, 23 (06) : 327 - 329
  • [10] Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors
    Ashley, G. M.
    Kirby, P. B.
    Butler, T. P.
    Whatmore, R.
    Luo, J. K.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 157 (12) : J419 - J424
12345