EFFECTS OF CRYSTALLINE DEFECTS ON ELECTRICAL-PROPERTIES IN SILICON FILMS ON SAPPHIRE

被引：24

作者：

ONGA, S

YOSHII, T

HATANAKA, K

YASUDA, Y

机构：

[1] TOKYO SHIBAURA ELECT CO LTD,TOSHIBA RES & DEV CTR,KAWASAKI,JAPAN

[2] GAKUSHUIN UNIV,FAC SCI,TOKYO,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1976年 / 15卷

关键词：

D O I：

10.7567/JJAPS.15S1.225

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：225 / 231

页数：7

共 50 条

[1] EFFECTS OF SAPPHIRE SURFACE TREATMENTS ON THE ELECTRICAL-PROPERTIES OF SILICON ON SAPPHIRE DEVICES
HAM, WE
DUFFY, MT
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (08) : C342 - C342
[2] PROCESSING EFFECTS ON THE ELECTRICAL-PROPERTIES OF DEFECTS IN SILICON
CASTALDINI, A
CAVALCOLI, D
CAVALLINI, A
[J]. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 4 (1-4): : 343 - 346
[3] DEPENDENCES OF ELECTRICAL-PROPERTIES ON THERMAL-STRESSES IN SILICON FILMS ON SAPPHIRE SUBSTRATES
BELOGLAZOV, AV
STUCHEBNIKOV, VM
KHASIKOV, VV
CHERNITSYN, VN
[J]. SOVIET PHYSICS SEMICONDUCTORS-USSR, 1982, 16 (08): : 946 - 947
[4] SILICON ON SAPPHIRE IN FRANCE - A REVIEW OF THE PHYSICOCHEMICAL AND ELECTRICAL-PROPERTIES
CRISTOLOVEANU, S
GHIBAUDO, G
KAMARINOS, G
[J]. REVUE DE PHYSIQUE APPLIQUEE, 1984, 19 (02): : 161 - 185
[5] ELECTRICAL-PROPERTIES OF EVAPORATED SILICON FILMS
SANGRADOR, J
ESQUIVIAS, I
RODRIGUEZ, T
SANZMAUDES, J
[J]. THIN SOLID FILMS, 1985, 125 (1-2) : 79 - 86
[6] ELECTRICAL-PROPERTIES OF JUNCTIONS BETWEEN GE FILMS AND MONO-CRYSTALLINE SILICON
TOVE, PA
ALI, MP
IBRAHIM, MM
NORDE, H
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 51 (02): : 491 - 496
[7] LINE DEFECTS AND THE ELECTRICAL-PROPERTIES OF THIN ZONE-RECRYSTALLIZED SILICON FILMS ON SILICON DIOXIDE
MABY, EW
ANTONIADIS, DA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (03) : C101 - C101
[8] ELECTRICAL-PROPERTIES OF LINE DEFECTS IN THIN ZONE-RECRYSTALLIZED SILICON FILMS ON SILICON DIOXIDE
MABY, EW
ANTONIADIS, DA
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (08) : 691 - 693
[9] ON THE ELECTRICAL-PROPERTIES OF POLYCRYSTALLINE DIAMOND FILMS ON SILICON
DECESARE, G
SALVATORI, S
VINCENZONI, R
ASCARELLI, P
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GALLUZZI, F
[J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) : 628 - 631
[10] PHOTOCONDUCTIVITY AND ELECTRICAL-PROPERTIES OF SILICON CONTAINING THERMAL DEFECTS
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PETROV, VV
TKACHEV, VD
[J]. SOVIET PHYSICS SEMICONDUCTORS-USSR, 1979, 13 (03): : 358 - 359

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