Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer

被引：3
|
作者：
Khlifi, Awatef [1 ]
Mezghani, Brahim [1 ]
Tounsi, Fares [2 ]
Ahmed, Aftab [3 ]
Pandit, Shardul [3 ]
Patkar, Rajul [3 ]
Dixit, Pradeep [3 ]
Baghini, Maryam Shojaei [3 ]
机构：
[1] Univ Sfax, Ecole Natl Ingenieurs Sfax, Mets Res Unit, Sfax 3038, Tunisia
[2] Univ Monastir, METS, ISIMM, Monastir, Tunisia
[3] Indian Inst Technol, Dept Elect Engn, Mumbai 400076, Maharashtra, India
来源：
2019 IEEE INTERNATIONAL CONFERENCE ON DESIGN & TEST OF INTEGRATED MICRO & NANO-SYSTEMS (DTS) | 2019年
关键词：
SU-8; polymer; MEMS; FEM-analysis; accelerometer; piezoresistive; dynamic study; DESIGN; SYSTEM;
D O I：
10.1109/dtss.2019.8915018
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
In this work, for the first-time dynamic behavior of an SU-8 polymer based single proof mass, 3-axis MEMS piezoresistive accelerometer is presented. The beams dimensions were optimized to induce the maximum stress with an applied acceleration of 100g. Polysilicon is used as a piezoresistive material to understand the sensitivity and deduce the gauge factor of the device. Finite Element Modeling analysis is used to simulate the dynamic behavior, frequency response and effects of squeeze-film damping. Frequency response and dynamic analysis are then validated. The Eigen frequencies for the first three modes were found to be 1.0847 kHz, 1.5067 kHz and 1.5073 kHz, respectively. The quality factor deduced from the frequency response is approximately 15. The maximum gauge factor is found to be 11.2.
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收藏
页数：6
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