A 3-axis force balanced accelerometer using a single proof-mass

被引：0
|
作者：
Lemkin, MA
Boser, BE
Auslander, D
Smith, JH
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
three-axis accelerometer; sigma-delta;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a new method for wideband force balancing a proof-mass in multiple axes simultaneously. Capacitive position sense and force feedback are accomplished using the same air-gap capacitors through time Proof of concept is experimentally with a single-mass monolithic surface micromachined 3-axis accelerometer.
引用
收藏
页码：1185 / 1188
页数：4
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