DYNAMIC SENSITIVITY MATRIX MEASUREMENT FOR SINGLE-MASS SOI 3-AXIS ACCELEROMETER

被引：0
|
作者：
Tsuchiya, T. [1 ]
Tabata, O. [1 ]
Umeda, A. [2 ]
机构：
[1] Kyoto Univ, Dept Micro Engn, Kyoto, Japan
[2] Natl Inst Adv Ind Sci & Technol, Tokyo, Japan
来源：
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2012年
基金：
日本科学技术振兴机构;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a method to measure the fully described dynamic sensitivity of three-axis accelerometers represented by 3-by-3 matrix. It can be derived through the measurements of the linearly independent amplitude vectors of input acceleration three times using the three degrees of freedom shaker. The sensitivity matrix of an SOI capacitive accelerometer with vertical combs has been measured, showing a good frequency response up to 100 Hz. The cross sensitivity shows the mechanical and electrical coupling between axes, but it can be compensated using the measured sensitivity matrix.
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页数：4
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