Mechanical Simulation of 3-Axis Accelerometer Using a Single Proof-Mass

被引：0
|
作者：
Maj, Cezary [1 ]
Napieralski, Andrzej [1 ]
机构：
[1] Lodz Univ Technol, Dept Microelect & Comp Sci, Wolczanska 221-223, PL-90924 Lodz, Poland
来源：
2017 XIIITH INTERNATIONAL CONFERENCE ON PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN (MEMSTECH) | 2017年
关键词：
Accelerometer; Comb-drive resonator; MEMS; Finite Element Method;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we present the design of 3-axis accelerometer that consists of one proof-mass. It is a combination of classical comb-drive and flat electrode accelerometers. The suspension of such sensor was designed to allow the measurement in all axes. The 3D model was built and analyzed in Comsol. Mechanical behavior of the sensor was investigated and basic parameters were extracted such as eigenfrequency and the deflection in all axes under the acceleration up to 8 g. Moreover, cross-axis deflection was calculated.
引用
收藏
页码：47 / 50
页数：4
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