Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer

被引：3

作者：

Khlifi, Awatef ^{[1
]}

Mezghani, Brahim ^{[1
]}

Tounsi, Fares ^{[2
]}

Ahmed, Aftab ^{[3
]}

Pandit, Shardul ^{[3
]}

Patkar, Rajul ^{[3
]}

Dixit, Pradeep ^{[3
]}

Baghini, Maryam Shojaei ^{[3
]}

机构：

[1] Univ Sfax, Ecole Natl Ingenieurs Sfax, Mets Res Unit, Sfax 3038, Tunisia

[2] Univ Monastir, METS, ISIMM, Monastir, Tunisia

[3] Indian Inst Technol, Dept Elect Engn, Mumbai 400076, Maharashtra, India

来源：

2019 IEEE INTERNATIONAL CONFERENCE ON DESIGN & TEST OF INTEGRATED MICRO & NANO-SYSTEMS (DTS) | 2019年

关键词：

SU-8; polymer; MEMS; FEM-analysis; accelerometer; piezoresistive; dynamic study; DESIGN; SYSTEM;

D O I：

10.1109/dtss.2019.8915018

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

In this work, for the first-time dynamic behavior of an SU-8 polymer based single proof mass, 3-axis MEMS piezoresistive accelerometer is presented. The beams dimensions were optimized to induce the maximum stress with an applied acceleration of 100g. Polysilicon is used as a piezoresistive material to understand the sensitivity and deduce the gauge factor of the device. Finite Element Modeling analysis is used to simulate the dynamic behavior, frequency response and effects of squeeze-film damping. Frequency response and dynamic analysis are then validated. The Eigen frequencies for the first three modes were found to be 1.0847 kHz, 1.5067 kHz and 1.5073 kHz, respectively. The quality factor deduced from the frequency response is approximately 15. The maximum gauge factor is found to be 11.2.

引用

页数：6

共 50 条

[41] Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer
A. Ravi Sankar
S. Das
S. K. Lahiri
[J]. Microsystem Technologies, 2009, 15 : 511 - 518
[42] Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer
Sankar, A. Ravi
Das, S.
Lahiri, S. K.
[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (04): : 511 - 518
[43] A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
Szermer, Michal
Zajac, Piotr
Amrozik, Piotr
Maj, Cezary
Jankowski, Mariusz
Jablonski, Grzegorz
Kielbik, Rafal
Nazdrowicz, Jacek
Napieralska, Malgorzata
Sakowicz, Bartosz
[J]. SENSORS, 2021, 21 (10)
[44] High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer
Souchon, Fredric
Joet, Loic
Ladner, Carine
Rey, Patrice
Louwers, Stephan
[J]. 2019 IEEE SENSORS, 2019,
[45] Epicardial Acceleration Signal Measured Using a Single Chip 3-axis Accelerometer
Fleischer, L. A.
Halvorsen, P. S.
Hoff, L.
Fosse, E.
Elle, O. J.
[J]. 14TH NORDIC-BALTIC CONFERENCE ON BIOMEDICAL ENGINEERING AND MEDICAL PHYSICS, 2008, 20 : 221 - +
[46] Road Condition Analysis Using 3-axis Accelerometer And GPS Sensors
Amirgaliyev, B. Y.
Kuatov, K. K.
Baibatyr, Z. Y.
[J]. 2016 IEEE 10TH INTERNATIONAL CONFERENCE ON APPLICATION OF INFORMATION AND COMMUNICATION TECHNOLOGIES (AICT), 2016, : 99 - 103
[47] Novel Algorithm for the Hemiplegic Gait Evaluation using a Single 3-axis Accelerometer
Lee, Hyo-Ki
Hwang, Sung-Jae
Cho, Sung-Pil
Lee, Dong-Ryul
You, Sung-Hyun
Lee, Kyoung-Joung
Kim, Yong-Ho
Choi, Ho-Seon
[J]. 2009 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOLS 1-20, 2009, : 3964 - +
[48] Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics
Din, Hussamud
Iqbal, Faisal
Lee, Byeungleul
[J]. MICROMACHINES, 2020, 11 (12) : 1 - 13
[49] Damping analysis of a quad beam MEMS piezoresistive accelerometer
Jency, J. Grace
Sekar, M.
Sankar, A. Ravi
[J]. INTERNATIONAL JOURNAL OF MODELLING AND SIMULATION, 2021, 41 (04): : 256 - 264
[50] A SINGLE MASS TWO-AXIS CAPACITIVE MEMS ACCELEROMETER WITH FORCE REBALANCE
Kose, Talha
Terzioglu, Yunus
Azgin, Kivanc
Akin, Tayfun
[J]. 2015 2ND IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (ISISS), 2015, : 49 - 52

← 1 2 3 4 5 →