Junctionless gate-all-around nanowire field-effect transistors with an extended gate in biomolecule detection

被引：7
|
作者：
Chen, Chih-Wei [1 ]
Lin, Ru-Zheng [1 ]
Chiang, Li-Chuan [1 ]
Pan, Fu-Ming [1 ]
Sheu, Jeng-Tzong [2 ,3 ]
机构：
[1] Natl Chiao Tung Univ, Inst Nanotechnol, Dept Mat Sci & Engn, 1001 Ta Hsueh Rd, Hsinchu 30050, Taiwan
[2] Natl Chiao Tung Univ, Inst Boimed Engn, 1001 Ta Hsueh Rd, Hsinchu 30050, Taiwan
[3] Natl Chiao Tung Univ, Ctr Emergent Funct Matter Sci, 1001 Ta Hsueh Rd, Hsinchu 30050, Taiwan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / 02期
关键词：
ELECTRICAL DETECTION; SILICON NANOWIRES; 1/F NOISE; SENSOR; SENSITIVITY; DEVICE; DNA;
D O I：
10.7567/1347-4065/aaf46b
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this study, we investigated the potential drift and sensitivity in an extended-gate (EG) field-effect-transistor (FET)-based potentiometric sensor with junctionless (JL) and inversion-mode (IM) gate-all-around (GAA) nanowire (NW) FETs. An EG electrode (EGE) coated with Al2O3 via plasmaenhanced atomic-layer deposition exhibited high stability. Both JL and IM GAA NWFETs were prepared in the same batch and exhibited high electrical performance, including a steep subthreshold swing of approximately 63 mV dec(-1) and a high ON/OFF current ratio of approximately 3 x 10(7) at V-DS = 0.1 V. However, JL GAA NWFETs exhibited higher drift stability than did IM GAA NWFETs under various working regions over a long period of operation. Furthermore, JL GAA NWFETs with EGEs (JL GAA NWFETs w-EGEs) exhibited the highest sensitivity when operating under the subthreshold region in pH sensing (Delta I/I-0 = similar to 4410%). The readout sensitivity reached S-out = 82%. A JL GAA NWFET w-EGE was also demonstrated as a potentiometric biosensor for streptavidin real-time detection at concentrations of 42 fM to 4.2 nM. (C) 2019 The Japan Society of Applied Physics
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页数：8
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