Linear Temperature Sensors in High-Voltage GaN-HEMT Power Devices

被引:0
|
作者
Reiner, Richard [1 ]
Waltereit, Patrick [1 ]
Weiss, Beatrix [1 ]
Wespel, Matthias [1 ]
Meder, Dirk [1 ]
Mikulla, Michael [1 ]
Quay, Ruediger [1 ]
Ambacher, Oliver [1 ]
机构
[1] Fraunhofer Inst Appl Solid State Phys IAF, Tullastr 72, D-79108 Freiburg, Germany
关键词
thermal; overload; thermistor; HFET; PTC; PERFORMANCE;
D O I
暂无
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
This work presents a high-voltage GaN-based power HEMT with a highly-linear, monolithically-integrated temperature sensor. The principle is shown and compared to other concepts. The sensor is fabricated by using a interconnect metallization without additional process steps. The performance of the sensor as well as of the power device is characterized. The 600 V power device achieves an on-state resistance of R-ON = 55 m Omega at a corresponding drain current I-D = 30 A and an advanced dynamic performance with a low gate charge of 20 nC.
引用
收藏
页码:2083 / 2086
页数:4
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