Microfabricated sensor device for CW and pulsed laser power measurements

被引：1

作者：

Hu, Yuqiang ^{[1
,2
,3
]}

Xie, Fei ^{[2
,4
]}

Liu, Qihui ^{[2
,4
]}

Wang, Nan ^{[2
,4
]}

Zhang, Jin ^{[2
]}

Liu, Yichen ^{[2
]}

Su, Yongquan ^{[1
,2
,3
]}

Wang, Yang ^{[2
,4
]}

Chen, Hao ^{[2
,4
]}

Wu, Zhenyu ^{[1
,2
,3
,4
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Microsyst & Infarmat Technol, State Key Lab Transducer Thchnol, Shanghai 200050, Peoples R China

[3] Shanghai Ind Technol Res Inst, Shanghai 201800, Peoples R China

[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 02期

关键词：

RADIATION-PRESSURE; FORCE; ABLATION; BEAM;

D O I：

10.1364/OE.476509

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

On-line measurement is a trend of development toward laser-based applications. We present a fiber-integrated force sensor device for laser power measurement with both CW mode and pulse mode based on laser radiometric heat and radiation force sensing simultaneously. The sensor device is fabricated using a standard microfabrication process. Laser intensity is determined through the displacement of a movable mirror measured by an integrated Fabry-Perot interferometer. Compared with the performance of the device in the ambient condition, a non-linearity error of 0.02% and measurement uncertainty of 2.06% is observed in the quasi-vacuum condition for CW laser illumination. This device can measure a CW laser power with a 46.4 mu W/Hz(1/2) noise floor and a minimum detection limit of 0.125mW. For a pulsed laser, a non-linearity error of 0.37% and measurement uncertainty of 2.08% is achieved with a noise floor of 1.3 mu J/Hz(1/2) and a minimum detection limit of 3 mu J. (c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：2330 / 2344

页数：15

共 50 条

[21] Measurements of microwave power and frequency in a pulsed free electron laser amplifier
Gardelle, J
Lefevre, T
Marchese, G
Rullier, JL
Donohue, JT
[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (06) : 1419 - 1424
[22] SATURATION OF LASER POWER OF CW ION LASER WITH LARGE BORED TUBES AND HIGH POWER CW UV
BOERSCH, H
BOSCHER, J
HODER, D
SCHAFER, G
[J]. PHYSICS LETTERS A, 1970, A 31 (04) : 188 - &
[23] Microfabricated Thin Film Impedance Sensor & AC Impedance Measurements
Yu, Jinsong
Liu, Chung-Chiun
[J]. SENSORS, 2010, 10 (06): : 5845 - 5858
[24] COMPARISON OF POLYSILICON FILMS ANNEALED WITH A CW OR PULSED LASER
WILSON, SR
PAULSON, WM
WHITE, CW
[J]. JOURNAL OF ELECTRONIC MATERIALS, 1983, 12 (01) : 143 - 159
[25] PULSED Q-SWITCHING OF A CW LASER CAVITY
MAGDICH, LN
[J]. OPTICS AND SPECTROSCOPY-USSR, 1971, 31 (02): : 161 - &
[26] IMPROVED CW LASER PENETRATION OF SOLIDS USING A SUPERIMPOSED PULSED LASER
ROBIN, JE
NORDIN, P
[J]. APPLIED PHYSICS LETTERS, 1976, 29 (01) : 3 - 5
[27] Novel coupling device of high peak power pulsed laser to multimode fiber
Zhao Xing-hai
Gao Yang
Cheng Wen-yong
Cheng Yong-sheng
Wei, Su
[J]. SOLID STATE LASERS AND AMPLIFIERS III, 2008, 6998
[28] Design of a Love wave mode device for use in a microfabricated glucose sensor
Hoang, Trinh B.
Hanke, Ulrik
Johannessen, Erik A.
Johannessen, Agne
[J]. 2016 IEEE International Frequency Control Symposium (IFCS), 2016, : 441 - 445
[29] The design and performance of CW and pulsed power couplers - A review
Garvey, T.
[J]. PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS, 2006, 441 (1-2): : 209 - 215
[30] High Power UHF IOT for CW and Pulsed Applications
O'Sullivan, Neil
Edwards, Martin
[J]. 2009 IEEE INTERNATIONAL VACUUM ELECTRONICS CONFERENCE, 2009, : 423 - 424

← 1 2 3 4 5 →