Microfabricated sensor device for CW and pulsed laser power measurements

被引：1

作者：

Hu, Yuqiang ^{[1
,2
,3
]}

Xie, Fei ^{[2
,4
]}

Liu, Qihui ^{[2
,4
]}

Wang, Nan ^{[2
,4
]}

Zhang, Jin ^{[2
]}

Liu, Yichen ^{[2
]}

Su, Yongquan ^{[1
,2
,3
]}

Wang, Yang ^{[2
,4
]}

Chen, Hao ^{[2
,4
]}

Wu, Zhenyu ^{[1
,2
,3
,4
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Microsyst & Infarmat Technol, State Key Lab Transducer Thchnol, Shanghai 200050, Peoples R China

[3] Shanghai Ind Technol Res Inst, Shanghai 201800, Peoples R China

[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

来源：

OPTICS EXPRESS | 2023年 / 31卷 / 02期

关键词：

RADIATION-PRESSURE; FORCE; ABLATION; BEAM;

D O I：

10.1364/OE.476509

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

On-line measurement is a trend of development toward laser-based applications. We present a fiber-integrated force sensor device for laser power measurement with both CW mode and pulse mode based on laser radiometric heat and radiation force sensing simultaneously. The sensor device is fabricated using a standard microfabrication process. Laser intensity is determined through the displacement of a movable mirror measured by an integrated Fabry-Perot interferometer. Compared with the performance of the device in the ambient condition, a non-linearity error of 0.02% and measurement uncertainty of 2.06% is observed in the quasi-vacuum condition for CW laser illumination. This device can measure a CW laser power with a 46.4 mu W/Hz(1/2) noise floor and a minimum detection limit of 0.125mW. For a pulsed laser, a non-linearity error of 0.37% and measurement uncertainty of 2.08% is achieved with a noise floor of 1.3 mu J/Hz(1/2) and a minimum detection limit of 3 mu J. (c) 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：2330 / 2344

页数：15

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