COMPARISON OF POLYSILICON FILMS ANNEALED WITH A CW OR PULSED LASER

被引：2
|
作者：
WILSON, SR [1 ]
PAULSON, WM [1 ]
WHITE, CW [1 ]
机构：
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1983年 / 12卷 / 01期
关键词：
D O I：
10.1007/BF02651640
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：143 / 159
页数：17
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