Efficient screening method for DRAM memory cell capacitor dielectric

被引：0

作者：

Furutani, Kiyohiro ^{[1
]}

Suwa, Makoto ^{[1
]}

Arimoto, Kazutami ^{[1
]}

Mashiko, Koichiro ^{[1
]}

Yamada, Michihiro ^{[1
]}

Matsumoto, Masatoshi ^{[1
]}

机构：

[1] Mitsubishi Electric Corp, Itami, Japan

来源：

Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi) | 1990年 / 73卷 / 11期

关键词：

MOS Dynamic RAMs (DRAMs);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

(Edited Abstract)

引用

页码：81 / 89

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