Efficient screening method for DRAM memory cell capacitor dielectric

被引：0
|
作者：
Furutani, Kiyohiro [1 ]
Suwa, Makoto [1 ]
Arimoto, Kazutami [1 ]
Mashiko, Koichiro [1 ]
Yamada, Michihiro [1 ]
Matsumoto, Masatoshi [1 ]
机构：
[1] Mitsubishi Electric Corp, Itami, Japan
来源：
Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi) | 1990年 / 73卷 / 11期
关键词：
MOS Dynamic RAMs (DRAMs);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
(Edited Abstract)
引用
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页码：81 / 89
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