Development and Application of Laser Direct Writing Lithography Technology (Invited)

被引：0
|
作者：
Chen, Linsen [1 ,2 ]
Huang, Wenbin [1 ,2 ]
Pu, Donglin [1 ,2 ]
Qiao, Wen [1 ,2 ]
Zhou, Fengbin [1 ,2 ]
Sui, Bowen [1 ,2 ]
Meng, Zhi [1 ,2 ]
机构：
[1] College of Optoelectronic Science and Engineering, Soochow University, Jiangsu, Suzhou,215006, China
[2] Engineering Research Center of Digital Laser Imaging and Display, Ministry of Education, Jiangsu, Suzhou,215006, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2024年 / 51卷 / 12期
关键词：
Compendex;
D O I：
10.3788/CJL240664
中图分类号：
学科分类号：
摘要：
3D printing - Fabrication - Flexible displays - Functional materials - Microwave sensors - Morphology - Nanoimprint lithography - Optoelectronic devices - Photonics - Substrates - Three dimensional displays
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