Development and Application of Laser Direct Writing Lithography Technology (Invited)

被引：0
|
作者：
Chen, Linsen [1 ,2 ]
Huang, Wenbin [1 ,2 ]
Pu, Donglin [1 ,2 ]
Qiao, Wen [1 ,2 ]
Zhou, Fengbin [1 ,2 ]
Sui, Bowen [1 ,2 ]
Meng, Zhi [1 ,2 ]
机构：
[1] College of Optoelectronic Science and Engineering, Soochow University, Jiangsu, Suzhou,215006, China
[2] Engineering Research Center of Digital Laser Imaging and Display, Ministry of Education, Jiangsu, Suzhou,215006, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2024年 / 51卷 / 12期
关键词：
Compendex;
D O I：
10.3788/CJL240664
中图分类号：
学科分类号：
摘要：
3D printing - Fabrication - Flexible displays - Functional materials - Microwave sensors - Morphology - Nanoimprint lithography - Optoelectronic devices - Photonics - Substrates - Three dimensional displays
引用
收藏
相关论文
共 50 条
  • [21] Direct laser writing defects in holographic lithography-created photonic lattices
    Sun, HB
    Nakamura, A
    Kaneko, K
    Shoji, S
    Kawata, S
    [J]. OPTICS LETTERS, 2005, 30 (08) : 881 - 883
  • [22] Photopolymerization Inhibition Dynamics for Sub-Diffraction Direct Laser Writing Lithography
    Harke, Benjamin
    Bianchini, Paolo
    Brandi, Fernando
    Diaspro, Alberto
    [J]. CHEMPHYSCHEM, 2012, 13 (06) : 1429 - 1434
  • [23] Estimation of line dimensions in 3D direct laser writing lithography
    Guney, M. G.
    Fedder, G. K.
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 26 (10)
  • [24] Design and Implementation of OPU-based Laser Direct Writing Lithography System
    Wang, Binchao
    Yu, Zixiao
    Bian, Hongxia
    Cui, Yanjun
    Tu, Peng
    [J]. JOURNAL OF LASER MICRO NANOENGINEERING, 2024, 19 (01): : 27 - 33
  • [25] Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing
    Levati, Valerio
    Girardi, Davide
    Pellizzi, Nicola
    Panzeri, Matteo
    Vitali, Matteo
    Petti, Daniela
    Albisetti, Edoardo
    [J]. ADVANCED MATERIALS TECHNOLOGIES, 2023, 8 (16)
  • [26] Development and application of a direct beam lithography for the bioelectronic device
    Choi, JW
    Nam, YS
    Oh, SY
    Kim, D
    Lee, WH
    [J]. MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 2000, 349 : 295 - 298
  • [27] Application of acoustooptical modulator in laser direct writing device
    [J]. 2001, Zhejiang University (35):
  • [28] Development of Blue Laser Direct-Write Lithography System
    Chang, Hao-Wen
    Lee, Hau-Wei
    Lin, Chorng-Tyan
    Wen, Zhi-Qun
    [J]. INTERNATIONAL JOURNAL OF ENGINEERING AND TECHNOLOGY INNOVATION, 2012, 2 (01) : 63 - 71
  • [29] Immersion lithography for laser mask writing
    Bassett, Derek W.
    Bonnecaze, Roger T.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (06): : 2659 - 2667
  • [30] Evaluation of thick-film photoresist for grayscale lithography utilizing direct laser writing
    Shoji, Masaaki
    Jotaki, Hideo
    Moriyama, Masaaki
    Totsu, Kentaro
    [J]. IEEJ Transactions on Sensors and Micromachines, 2020, 140 (05) : 113 - 118
12345