RAPID IDENTIFICATION OF FAULTED LOOPS IN ION-IMPLANTED SILICON

被引：0
|
作者：
SHEVLIN, CM
DEMER, LJ
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1978年 / 38卷 / 3-4期
关键词：
D O I：
10.1080/00337577808233228
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
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页码：197 / 199
页数：3
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