RAPID IDENTIFICATION OF FAULTED LOOPS IN ION-IMPLANTED SILICON

被引：0

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作者：

SHEVLIN, CM

DEMER, LJ

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1978年 / 38卷 / 3-4期

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D O I：

10.1080/00337577808233228

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

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页码：197 / 199

页数：3

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