DYNAMIC COMPUTER-SIMULATION OF HIGH-ENERGY ION-IMPLANTATION

被引：8
|
作者：
MOLLER, W
机构：
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 2卷 / 1-3期
关键词：
D O I：
10.1016/0921-5107(89)90071-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：21 / 25
页数：5
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