PHOTORESIST OUTGASSING AND CARBONIZATION DURING HIGH-ENERGY ION-IMPLANTATION

被引：5
|
作者：
OCONNOR, JP
RILEY, JT
机构：
来源：
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1989年 / 2卷 / 1-3期
关键词：
D O I：
10.1016/0921-5107(89)90093-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：177 / 182
页数：6
相关论文
共 50 条
  • [1] HIGH-ENERGY ION-IMPLANTATION
    ZIEGLER, JF
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 6 (1-2): : 270 - 282
  • [2] HIGH-ENERGY ION-IMPLANTATION
    BURENKOV, AF
    KOMAROV, FF
    ZHURNAL TEKHNICHESKOI FIZIKI, 1988, 58 (03): : 559 - 566
  • [3] HIGH-ENERGY ION-IMPLANTATION FOR ULSI
    TSUKAMOTO, K
    KOMORI, S
    KUROI, T
    AKASAKA, Y
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 584 - 591
  • [4] HIGH-ENERGY ION-IMPLANTATION IN GAAS
    WESCH, W
    WENDLER, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 (pt 2): : 716 - 720
  • [5] HIGH DOSE ION-IMPLANTATION INTO PHOTORESIST
    OKUYAMA, Y
    HASHIMOTO, T
    KOGUCHI, T
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1293 - 1298
  • [6] EFFECT OF HIGH-ENERGY ION-IMPLANTATION ON SAPPHIRE
    MIYANO, T
    MATSUMAE, T
    YOKOO, H
    ANDOH, Y
    KIUCHI, M
    SATOU, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 (pt 2): : 1167 - 1172
  • [7] HIGH-ENERGY ION-IMPLANTATION EFFECTS IN SILICON
    BYRNE, PF
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (02) : 1146 - 1147
  • [8] MODELING OF LATTICE DAMAGE ACCUMULATION DURING HIGH-ENERGY ION-IMPLANTATION
    HECKING, N
    KAAT, EHT
    APPLIED SURFACE SCIENCE, 1989, 43 : 87 - 96
  • [9] UV curing and photoresist outgassing in high energy implantation
    Jones, MA
    Erokhin, Y
    Horsky, T
    Insalaco, L
    Whiteside, D
    Slater, S
    Buffat, S
    Kickel, B
    Parrill, T
    Xu, JJ
    ION IMPLANTATION TECHNOLOGY - 96, 1997, : 182 - 185
  • [10] CLADDING OF A CRYSTAL FIBER BY HIGH-ENERGY ION-IMPLANTATION
    SAINI, DPS
    SHIMOJI, Y
    CHANG, RSF
    DJEU, N
    OPTICS LETTERS, 1991, 16 (14) : 1074 - 1076
12345