METAL-CONTAINING FLUOROPOLYMER FILMS PRODUCED BY SIMULTANEOUS PLASMA-ETCHING AND POLYMERIZATION - EFFECTS OF HYDROGEN OR OXYGEN

被引：34

作者：

KAY, E

DILKS, A

SEYBOLD, D

机构：

[1] UNIV DURHAM,DEPT CHEM,DURHAM DH1 3LE,ENGLAND

[2] IBM GERMANY LTD,D-7032 SINDELFINGEN,FED REP GER

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期

关键词：

D O I：

10.1063/1.327491

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5678 / 5687

页数：10

共 50 条

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