METAL-CONTAINING FLUOROPOLYMER FILMS PRODUCED BY SIMULTANEOUS PLASMA-ETCHING AND POLYMERIZATION - EFFECTS OF HYDROGEN OR OXYGEN

被引：34
|
作者：
KAY, E
DILKS, A
SEYBOLD, D
机构：
[1] UNIV DURHAM,DEPT CHEM,DURHAM DH1 3LE,ENGLAND
[2] IBM GERMANY LTD,D-7032 SINDELFINGEN,FED REP GER
来源：
JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期
关键词：
D O I：
10.1063/1.327491
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5678 / 5687
页数：10
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