A PULSED PLASMA X-RAY SOURCE FOR X-RAY-LITHOGRAPHY

被引：0
|
作者：
MATTHEWS, S [1 ]
DAHLBACKA, G [1 ]
STRINGFIELD, R [1 ]
COOPER, R [1 ]
SZE, H [1 ]
机构：
[1] PHYS INT CO,SAN LEANDRO,CA 94577
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C112 / C113
页数：2
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