THE SUPERCONDUCTING X-RAY-LITHOGRAPHY SOURCE PROGRAM AT BROOKHAVEN

被引：1
|
作者：
WILLIAMS, GP
HEESE, RN
VIGNOLA, G
MURPHY, JB
GODEL, JB
HSIEH, H
GALAYDA, J
SEIFERT, A
KNOTEK, ML
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1141046
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：1628 / 1629
页数：2
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