PULSED PLASMA SOURCE FOR X-RAY-LITHOGRAPHY

被引：0
|
作者：
MATTHEWS, SM [1 ]
STRINGFIELD, R [1 ]
ROTH, I [1 ]
COOPER, R [1 ]
ECONOMOU, NP [1 ]
FLANDERS, DC [1 ]
机构：
[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1981年 / 275卷
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：52 / 54
页数：3
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