X-RAY-LITHOGRAPHY USING LASER PLASMA AS A SOURCE

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作者：
YAAKOBI, B
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SOLID STATE TECHNOLOGY | 1984年 / 27卷 / 11期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：239 / 240
页数：2
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