X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE

被引：62
|
作者：
PEARLMAN, JS
RIORDAN, JC
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期
关键词：
D O I：
10.1116/1.571241
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1190 / 1193
页数：4
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