DEPTH PROFILING OF MICROELECTRONIC STRUCTURES BY SIMS AND AES

被引：7
|
作者：
MAIER, M
机构：
来源：
VACUUM | 1986年 / 36卷 / 7-9期
关键词：
D O I：
10.1016/0042-207X(86)90217-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：409 / 412
页数：4
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