DEPTH PROFILING BY SIMS DEPTH RESOLUTION, DYNAMIC-RANGE AND SENSITIVITY

被引：122
|
作者：
MAGEE, CW
HONIG, RE
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1982年 / 4卷 / 02期
关键词：
D O I：
10.1002/sia.740040202
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：35 / 41
页数：7
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