DEPTH PROFILING OF MICROELECTRONIC STRUCTURES BY SIMS AND AES

被引：7
|
作者：
MAIER, M
机构：
来源：
VACUUM | 1986年 / 36卷 / 7-9期
关键词：
D O I：
10.1016/0042-207X(86)90217-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
下载
收藏
页码：409 / 412
页数：4
相关论文
共 50 条
  • [31] Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures
    Rar, A.
    Hofmann, S.
    Yoshihara, K.
    Kajiwara, K.
    Applied Surface Science, 1999, 144 : 310 - 314
  • [32] EVALUATION OF CONCENTRATION-DEPTH PROFILES BY SPUTTERING IN SIMS AND AES
    HOFMANN, S
    APPLIED PHYSICS, 1976, 9 (01): : 59 - 66
  • [33] AES Depth profiling of semiconducting multilayer structures using an ion beam bevelling technique
    M. Procop
    A. Klein
    I. Rechenberg
    D. Krüger
    Fresenius' Journal of Analytical Chemistry, 1997, 358 : 358 - 360
  • [34] AES depth profiling of semiconducting multilayer structures using an ion beam bevelling technique
    Procop, M
    Klein, A
    Rechenberg, I
    Kruger, D
    FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1997, 358 (1-2): : 358 - 360
  • [35] CRYSTALLINE EFFECTS IN-DEPTH RESOLUTION IN AES DEPTH PROFILING
    KAJIWARA, K
    SURFACE AND INTERFACE ANALYSIS, 1994, 22 (1-12) : 22 - 26
  • [36] Advances in sputter depth profiling using AES
    Hofmann, S
    SURFACE AND INTERFACE ANALYSIS, 2003, 35 (07) : 556 - 563
  • [37] Quantitative AES-Mapping and Depth Profiling
    Martin Prutton
    David K. Wilkinson
    Daniel A. Loveday
    Microchimica Acta, 2000, 132 (2-4) : 225 - 236
  • [38] COMPARISON OF ROTATIONAL DEPTH PROFILING WITH AES AND XPS
    ZALAR, A
    HOFMANN, S
    APPLIED SURFACE SCIENCE, 1993, 68 (03) : 361 - 367
  • [39] Determination of interface locations and layer thicknesses in SIMS and AES depth profiling of Si/Ti multilayer films by 50 at% definition
    Hwang, Hye Hyun
    Jang, Jong Shik
    Kang, Hee Jae
    Kim, Kyung Joong
    SURFACE AND INTERFACE ANALYSIS, 2014, 46 : 272 - 275
  • [40] Quantitative AES-mapping and depth profiling
    Prutton, M
    Wilkinson, DK
    Loveday, DA
    MIKROCHIMICA ACTA, 2000, 132 (2-4) : 225 - 236
12345