PREPARATION OF ULTRATHIN EPITAXIAL SILICON FILMS

被引：0
|
作者：
SKELLY, G
SIMPSON, J
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1969年 / 116卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C249 / &
相关论文
共 50 条
  • [41] VACUUM PREPARATION OF EPITAXIAL LAYERS OF SILICON
    POSTNIKO, VV
    LOGINOVA, RG
    OVSYANNI.MI
    SOVIET PHYSICS CRYSTALLOGRAPHY, USSR, 1966, 10 (04): : 495 - +
  • [42] IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS
    THOMAS, CO
    KAHNG, D
    MANZ, RC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (11) : 1055 - 1061
  • [43] PREPARATION OF ULTRATHIN FILMS FOR ELECTRON MICROSCOPY
    JOHARI, DP
    TEXTILE RESEARCH JOURNAL, 1970, 40 (03) : 293 - &
  • [44] Preparation of Patterned Ultrathin Polymer Films
    Yang, Huige
    Su, Meng
    Li, Kaiyong
    Jiang, Lei
    Song, Yanlin
    Doi, Masao
    Wang, Jianjun
    LANGMUIR, 2014, 30 (31) : 9436 - 9441
  • [45] CRYSTALLOGRAPHIC DEFECTS IN EPITAXIAL SILICON FILMS
    RAVI, KV
    THIN SOLID FILMS, 1976, 31 (1-2) : 171 - 183
  • [46] Nanostructures on epitaxial SiGe films on silicon
    Chen, LJ
    Wu, WW
    Lee, SW
    Chen, HC
    Yang, TH
    STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS XL (SOTAPOCS XL) AND NARROW BANDGAP OPTOELECTRONIC MATERIALS AND DEVICES II, 2004, 2004 (02): : 241 - 252
  • [47] Epitaxial growth of oxide films on silicon
    Doukkali, A.
    Vide: Science, Technique et Applications, 1997, 53 (283): : 113 - 123
  • [48] PREPARATION OF ORIENTED ULTRATHIN POLYETHYLENE FILMS
    HASHIMOTO, S
    INOKUCHI, H
    POLYMER JOURNAL, 1976, 8 (05) : 467 - 469
  • [49] Preparation and characterization of ultrathin polymeric films
    Pientka, Z
    Brozová, L
    Bleha, M
    Puri, P
    JOURNAL OF MEMBRANE SCIENCE, 2003, 214 (01) : 157 - 161
  • [50] FABRICATION OF EPITAXIAL SIC FILMS ON SILICON
    JACKSON, DM
    HOWARD, RW
    TRANSACTIONS OF THE METALLURGICAL SOCIETY OF AIME, 1965, 233 (03): : 468 - &
12345