Epitaxial growth of oxide films on silicon

被引：0
|
作者：
Doukkali, A.
机构：
来源：
Vide: Science, Technique et Applications | 1997年 / 53卷 / 283期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
页码：113 / 123
相关论文
共 50 条
  • [1] Epitaxial growth of zinc oxide thin films on silicon
    Jin, CM
    Narayan, R
    Tiwari, A
    Zhou, HH
    Kvit, A
    Narayan, J
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 117 (03): : 348 - 354
  • [2] Epitaxial oxide films on silicon: Growth, modeling and device properties
    Droopad, R
    Wang, J
    Eisenbeiser, K
    Yu, Z
    Ramdani, J
    Curless, JA
    Overgaard, CD
    Finder, JM
    Hallmark, JA
    Kaushik, V
    Nguyen, BY
    Marshall, DS
    Ooms, WJ
    RECENT DEVELOPMENTS IN OXIDE AND METAL EPITAXY-THEORY AND EXPERIMENT, 2000, 619 : 155 - 165
  • [3] Epitaxial growth of praseodymium oxide on silicon
    Osten, HJ
    Liu, JP
    Bugiel, E
    Müssig, HJ
    Zaumseil, P
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 87 (03): : 297 - 302
  • [4] GROWTH OF EPITAXIAL GAAS FILMS ON SILICON SUBSTRATES
    VERNON, S
    SHANFIELD, S
    WOLFSON, R
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (06) : C240 - C240
  • [5] EPITAXIAL GROWTH OF CUBIC SILICON CARBIDE FILMS
    KHAN, IH
    SUMMERGR.RN
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (05): : 327 - &
  • [6] Epitaxial growth and characterization of silicon carbide films
    Dhanaraj, G
    Dudley, M
    Chen, Y
    Ragothamachar, B
    Wu, B
    Zhang, H
    JOURNAL OF CRYSTAL GROWTH, 2006, 287 (02) : 344 - 348
  • [7] Epitaxial growth of cadmium sulfide films on silicon
    V. V. Antipov
    S. A. Kukushkin
    A. V. Osipov
    Physics of the Solid State, 2016, 58 : 629 - 632
  • [8] Substrate heater for the growth of epitaxial silicon films
    Deming, M
    Varhue, W
    Adams, E
    Lavoie, M
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1999, 70 (03): : 1821 - 1823
  • [9] EPITAXIAL GROWTH OF SILICON FILMS EVAPORATED ON SAPPHIRE
    YASUDA, Y
    OHMURA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1969, 8 (09) : 1098 - &
  • [10] TETRAHEDRAL GROWTH IN PYROLYTIC SILICON EPITAXIAL FILMS
    CHU, TL
    GAVALER, JR
    JOURNAL OF APPLIED PHYSICS, 1964, 35 (12) : 3619 - &
12345