SUPERCONDUCTOR WIRING IN MULTICHIP-MODULE FOR JOSEPHSON LSI CIRCUITS

被引:10
|
作者
TANAHASHI, S [1 ]
KUBO, T [1 ]
KAWABATA, K [1 ]
JIKUHARA, R [1 ]
KAJI, G [1 ]
TERASAWA, M [1 ]
NAKAGAWA, H [1 ]
AOYAGI, M [1 ]
KUROSAWA, I [1 ]
TAKADA, S [1 ]
机构
[1] ELECTROTECH LAB,TSUKUBA 305,JAPAN
来源
关键词
SUPERCONDUCTING MULTICHIP MODULE; NB POLYIMIDE SUPERCONDUCTOR WIRING; JOSEPHSON LSI;
D O I
10.1143/JJAP.32.L898
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nb/polyimide stacked layers on a multilayer ceramic substrate makes it possible to fabricate superconducting off-chip wiring for control signal lines. This superconducting multichip module (SuperMCM) also provides matching circuits for the clock signal and DC bias circuits beneath the superconducting transmission lines. The first prototype SuperMCM in the world successfully made,which has been designed to drive Josephson LSI chips at the highest clock frequency of 1.2 GHz.
引用
收藏
页码:L898 / L900
页数:3
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