OBSERVATION OF THE DEFECTS IN SEMICONDUCTORS BY PULSED SCANNING ELECTRON-MICROSCOPY

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作者：

BOULOU, M

SCHILLER, C

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来源：

JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1981年 / 6卷 / 01期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：39 / 53

页数：15

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