SCANNING ELECTRON-MICROSCOPY AND ELECTRON LITHOGRAPHY

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作者：

VASICHEV, BN

机构：

来源：

SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1978年 / 45卷 / 09期

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中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

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页码：592 / 597

页数：6

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