OBSERVATION OF THE DEFECTS IN SEMICONDUCTORS BY PULSED SCANNING ELECTRON-MICROSCOPY

被引：0
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作者：
BOULOU, M
SCHILLER, C
机构：
来源：
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1981年 / 6卷 / 01期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：39 / 53
页数：15
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