FACTORS CONTROLLING THE ETCHING RATE AND ETCHING PROFILE IN THE O-2 REACTIVE ION ETCHING PATTERN TRANSFER STEP IN MULTILEVEL LITHOGRAPHY

被引：6
|
作者：
JURGENSEN, CW
SHAQFEH, ESG
机构：
来源：
POLYMER ENGINEERING AND SCIENCE | 1989年 / 29卷 / 13期
关键词：
D O I：
10.1002/pen.760291310
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：878 / 881
页数：4
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