A TEST PATTERN FOR THE EVALUATION OF BIPOLAR INTEGRATED-CIRCUIT PROCESSES

被引：0

作者：

DRUM, CM ^{[1
]}

PANOUSIS, PT ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C99 / C99

页数：1

共 50 条

[11] MICRO-ELECTRONIC TEST PATTERN FOR MEASURING UNIFORMITY OF AN INTEGRATED-CIRCUIT FABRICATION TECHNOLOGY
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