TEST DEVICE STRUCTURES FOR INTEGRATED-CIRCUIT DESIGN, PROCESS TECHNOLOGY DEVELOPMENT AND EVALUATION

被引：1

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作者：

SRIVASTAVA, A

机构：

来源：

MICROELECTRONICS AND RELIABILITY | 1982年 / 22卷 / 02期

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D O I：

10.1016/0026-2714(82)90178-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：195 / 206

页数：12

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