A 45GHZ ALGAAS/GAAS HBT IC TECHNOLOGY WITHOUT ION-IMPLANTATION

被引:0
|
作者
PRASAD, SJ
VETANEN, B
HAYNES, C
PARK, S
BEERS, I
DIAMOND, S
PUBANZ, G
EBNER, J
SANIELEVICI, S
AGOSTON, A
机构
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D O I
10.1016/0167-9317(92)90465-4
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A 45GHz HBT IC technology with 1.4THz Schottky diodes is described. The process is mesa isolated and implant-free. The process integrates NiCr resistors, MIM capacitors and air-bridge inductors. A divide-by-eight prescaler shows good performance up to 13.5GHz. A pulser circuit using the Schottky diodes produced a voltage pulse with 10.35ps rise time.
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页码:413 / 416
页数:4
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