ION-IMPLANTATION INTO GAAS

被引：0
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作者：
CROSET, M
ICOLE, J
PERROCHEAU, J
机构：
来源：
REVUE TECHNIQUE THOMSON-CSF | 1980年 / 12卷 / 04期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：827 / 852
页数：26
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