ION-IMPLANTATION OF GAAS INTEGRATED-CIRCUITS

被引：2

|

作者：

LIVINGSTONE, AW

LEIGH, PA

MCINTYRE, N

HALL, IP

BOWIE, JA

SMITH, PJ

机构：

来源：

SOLID-STATE ELECTRONICS | 1983年 / 26卷 / 01期

关键词：

D O I：

10.1016/0038-1101(83)90156-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：19 / &

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