ION-IMPLANTATION AS A TOOL TO CONTROL PROPERTIES OF AMORPHOUS HYDROGENATED SILICON

被引：6
|
作者：
VAVILOV, VS
AKIMCHENKO, IP
KRASNOPEVTSEV, VV
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 94卷 / 01期
关键词：
D O I：
10.1002/pssa.2210940142
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：343 / 350
页数：8
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